Reduction in thermally induced displacements in an XY contouring stage through FEA analysis inspired design

T. Wemyss; J. Phelan

Reduction in thermally induced displacements in an XY contouring stage through FEA analysis inspired design

T. Wemyss, J. Phelan

Department of Engineering Technology

Research output: Contribution to conference › Paper › peer-review

Abstract

Temperature induced expansion can result in unwanted movements along all axes of precision positioning stages. As part of the development of such a stage, finite element analysis techniques were applied to test design configurations and to facilitate the convergence on optimum solutions. This extended abstract presents is a sample of the FEA work done in the design of an XY flexure stage which will form the basis for a new XYZ contouring system. A previous paper outlining in a more general context the development of this stage entitled "Movement at nano resolution in a noisy environment" was presented at the 2004 International Manufacturing Conference in Limerick, Ireland.

Original language	English
Pages	469-472
Number of pages	4
Publication status	Published - 2005
Event	5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005 - Montpellier, France Duration: 08 May 2005 → 11 May 2005

Conference

Conference	5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005
Country/Territory	France
City	Montpellier
Period	08/05/2005 → 11/05/2005

Cite this

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title = "Reduction in thermally induced displacements in an XY contouring stage through FEA analysis inspired design",

abstract = "Temperature induced expansion can result in unwanted movements along all axes of precision positioning stages. As part of the development of such a stage, finite element analysis techniques were applied to test design configurations and to facilitate the convergence on optimum solutions. This extended abstract presents is a sample of the FEA work done in the design of an XY flexure stage which will form the basis for a new XYZ contouring system. A previous paper outlining in a more general context the development of this stage entitled {"}Movement at nano resolution in a noisy environment{"} was presented at the 2004 International Manufacturing Conference in Limerick, Ireland.",

author = "T. Wemyss and J. Phelan",

year = "2005",

language = "English",

pages = "469--472",

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AU - Wemyss, T.

AU - Phelan, J.

PY - 2005

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AB - Temperature induced expansion can result in unwanted movements along all axes of precision positioning stages. As part of the development of such a stage, finite element analysis techniques were applied to test design configurations and to facilitate the convergence on optimum solutions. This extended abstract presents is a sample of the FEA work done in the design of an XY flexure stage which will form the basis for a new XYZ contouring system. A previous paper outlining in a more general context the development of this stage entitled "Movement at nano resolution in a noisy environment" was presented at the 2004 International Manufacturing Conference in Limerick, Ireland.

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M3 - Paper

AN - SCOPUS:84919934989

SP - 469

EP - 472

T2 - 5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005

Y2 - 8 May 2005 through 11 May 2005

ER -

Reduction in thermally induced displacements in an XY contouring stage through FEA analysis inspired design

Abstract

Conference

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